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Obtaining plasma parameters by Langmuir probes and optical emission spectroscopy in low-pressure DC plasma
Şentürk, Kenan; Şen, Tuba; Çoruhlu, Turgay; Shahzad, Aamir; Aslan, Necdet (TAYLOR & FRANCIS LTD, 2-4 PARK SQUARE, MILTON PARK, ABINGDON OR14 4RN, OXON, ENGLAND, 2023)The plasma environment in low-pressure systems allows coating different materials such as glasses, textiles, metals, etc. at the atomic level. Although vacuum coating is one of the best methods for thin film coating, the ...